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high quality silicon carbide wafer cassette

DETECT WAFER PROTRUSION FROM A WAFER CASSETTE - Patent

degree.; providing a wafer cassette comprising a top, a bottom, opposite Examples of wafers include, but are not limited to, silicon wafers,

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US Patent # 9,038,565. Abatement of reaction gases from

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Identification and Abatement of Silicon Wafer Vibration in

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